1, 6, 153, 378, 561, 861, 1653, 1770, 2850, 4005, 4950, 5565, 8646, 10878, 11781, 12090, 13041, 20706, 21945, 52326, 54285, 68265, 78210, 94830, 119805, 141246, 144453, 167910, 182106, 185745, 201930, 279378, 285390, 289941, 308505, 321201, 335790, 340725, 342378, 367653, 383250, 402753, 404550, 419070, 469965, 487578, 493521, 501501, 511566, 542361, 567645, 569778, 595686, 602253, 613278, 676866, 712221, 731445, 741153, 813450, 821121, 875826, 886446, 982101, 1018878, 1041846, 1050525, 1085601, 1088550, 1133265, 1148370, 1169685, 1185030, 1197378, 1298466, 1376970, 1386945, 1457778, 1637145, 1640766, 1695561, 1849926, 1865346, 1955253, 2067561, 2087946, 2100225, 2149701, 2153850, 2187186, 2216565, 2267385, 2301585, 2340366, 2357706, 2423301, 2512161, 2552670, 2584401, 2676141, 2736630, 2750685, 2845305, 2850078, 2902845, 2907666, 2965830, 3004926, 3039345, 3083886, 3158841, 3184026, 3265290, 3280641, 3446625, 3509925, 3515226, 3573801, 3703281, 3708726, 3725085, 3840606, 3885078, 3901821, 4037061, 4059825, 4128501, 4157286, 4180386, 4367490, 4408965, 4534566, 4582878, 4625361, 4803450, 4828278, 4921953, 4972281, 5105610, 5286126, 5384121, 5436753, 5576130, 5596185, 5764710, 5839653, 5846490, 5928846, 5949525, 5984070, 6032601, 6095286, 6179370, 6342141, 6349266, 6435078, 6492606, 6521466, 6895041, 6984453, 7112106, 7165005, 7225701, 7386246, 7533021, 7571886, 7603050, 7626465, 7759830, 7982010, 8070153, 8102325, 8272278, 8362005, 8435778, 8792721, 8834706, 8893653, 8969730, 9063153, 9071670, 9139950, 9303141, 9511341, 9616305, 9660210, 9721845, 9872346, 9979278, 10006101, 10194870, 10303530, 10669890, 10697625, 11080278, 11146281, 11193546, 11259885, 11536806, 11953605, 12031965, 12517506, 12627825, 12718446, 12992253, 13084170, 13207230, 13579866, 13736661, 13778625, 13862745, 13873278, 13957686, 14340690, 14631345, 14903070, 15287685, 15465141, 15520806, 15688401, 15699606, 15834378, 15924546, 15958425, 16196586, 16333470, 16551381, 16921653, 17202045, 17213778, 17449278, 17484741, 17817465, 17877210, 17961021, 18201561, 18310326, 18395145, 18650778, 18834453, 19080753, 19341090, 19540626, 19879665, 20247066, 20298006, 20336253, 20592153, 20746461, 20862570, 21056805, 21108753, 21369453, 21382530, 21579165, 21644910, 21737121, 21961878, 22321221, 22858941, 23348361, 23636250, 23842965, 23912070, 23953581, 24245166, 24412578, 24454521, 24918270, 25087986, 25144686, 25315170, 25945206, 27051690, 27569025, 27583878, 27881778, 28166265, 28422030, 28467285.

180984825, 182701170, 184540866, 185310126, 185579745, 185926686, 186351165, 187317690, 188247906, 189647550, 189764421, 190544481, 193051425, 194311041, 194942385, 195258441, 195772578, 197041026, 199110990, 199590210.